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机译:用于片上AFM的高带宽MEMS纳米定位器:设计,表征和控制
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle Australia, Newcastle, NSW, Australia;
atomic force microscopy; control system synthesis; damping; electrostatic actuators; feedback; nanopositioning; oscillations; AFM; electrostatic comb actuator; electrothermal sensor; feedback controller design; high-bandwidth MEMS nanopositioner; microelectromechanical system; on-chip atomic force microscopy; oscillatory behavior damping; Bandwidth; Force; Micromechanical devices; Nanopositioning; Sensor phenomena and characterization; System-on-chip; Electrostatic actuators; electrothermal sensors; high-bandwidth nanopositioner; microelectromechanical systems (MEMS); on-chip atomic force microscopy (AFM); on-chip atomic force microscopy (AFM).;
机译:用于片上高速AFM的反馈控制MEMS纳米定位器
机译:用于片上AFM的2自由度静电驱动MEMS纳米定位器
机译:片上原子力显微镜的MEMS纳米定位器:串行运动学设计
机译:高带宽2DOF MEMS纳米定位器的设计,制造和表征
机译:设计,表征和控制用于扫描探针显微镜应用的高带宽串行运动纳米定位平台。
机译:基于AFM的心脏病应用电容MEMS压力传感器的表征方法
机译:新型一次性MEMS电阻控制器的设计,仿真,制造和表征