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Know what's in your cleanroom wipers-Part Two

机译:知道洁净室的刮水器里有什么-第二部分

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摘要

Nonvolatile residue (NVR )—NVR is the quantity of molecular matter remaining after the filtration of a solvent containing contaminants and evaporation of the solvent at a specified temperature. More simply, NVR is a measure of contamination that will not evaporate. NVR is a residue of indistinct dimensions that can consist of high molecular weight organic moieties (e.g., hydrocarbons, silicones, alkyl phthalates, oligomers) or ionic species present in the wiper matrix. The composition of the residue will depend on the extractant solution used. Organic solvents such as alcohol will favor the extraction of organic residues, whereas water will be more efficient at extracting ionic constituents. Low-NVR wipers are specified for cleaning cleanrooms, so that the cleaning agents will not dissolve appreciable amounts of contaminants from the wiper to deposit on the wiped surface. Cleanroom wipers are commonly tested for NVR using 100 percent isopropyl alcohol (IPA) or deionized water as the extractant. An ASTM procedure and the RP4.3 document provide a comprehensive description of testing wipers for NVR. The RP4.3 document suggests either of two extraction condi- tions—boiling a quantity of wipers in the sol-vent of interest for five minutes or steeping the wipers in the solvent at ambient temperature for 10 minutes. After extraction, the solution is filtered and then evapo- rated. The weight of the residue remaining after evaporation is the NVR and is expressed either in g/m~2 or g/g of fabric. To avoid weighing errors, at least 50 mg of residue should be available after extraction of the fabric and evaporation of the solvent. This dictates the number of wipers that must be collectively extracted.
机译:不挥发残留物(NVR)-NVR是指在指定温度下过滤包含污染物的溶剂并蒸发掉溶剂后残留的分子量。更简单地说,NVR是一种不会蒸发的污染量度。 NVR是尺寸不清楚的残渣,其可由擦拭器基质中存在的高分子量有机部分(例如,烃,硅酮,烷基邻苯二甲酸酯,低聚物)或离子性物质组成。残留物的组成取决于所使用的萃取剂溶液。有机溶剂(例如酒精)将有助于提取有机残留物,而水在提取离子成分方面会更有效。低NVR刮水器被指定用于清洁洁净室,以使清洁剂不会溶解来自刮水器的大量污染物以沉积在被擦拭表面上。洁净室刮水器通常使用100%异丙醇(IPA)或去离子水作为萃取剂进行NVR测试。 ASTM规程和RP4.3文档全面介绍了NVR测试刮水器。 RP4.3文件提出了两种萃取条件之一:将一定数量的擦拭布在目标溶剂中煮沸5分钟,或将擦拭布在环境温度下浸入溶剂10分钟。萃取后,将溶液过滤,然后蒸发。蒸发后残留的残留物重量为NVR,以织物的g / m〜2或g / g表示。为避免称重错误,在提取织物和蒸发溶剂后,至少应有50 mg的残留物。这决定了必须共同抽取的刮水器数量。

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