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Multiphysics coupling simulation of RDE for PCB manufacturing

机译:用于PCB制造的RDE的多物理场耦合模拟

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摘要

Purpose - The purpose of this paper is to optimize experimental parameters and gain further insights into the plating process in the fabrication of high-density interconnections of printed circuit boards (PCBs) by the rotating disc electrode (RDE) model. Via metallization by copper electrodeposition for interconnection of PCBs has become increasingly important. In this metallization technique, copper is directly filled into the vias using special additives. To investigate electrochemical reaction mechanisms of electrodeposition in aqueous solutions, using experiments on an RDE is common practice. Design/methodology/approach - An electrochemical model is presented to describe the kinetics of copper electrodeposition on an RDE, which builds a bridge between the theoretical and experimental study for non-uniform copper electrodeposition in PCB manufacturing. Comsol Multiphysics, a multiphysics simulation platform, is invited to modeling flow field and potential distribution based on a two-dimensional (2D) axisymmetric physical modeling. The flow pattern in the electrolyte is determined by the 2D Navier-Stokes equations. Primary, secondary and tertiary current distributions are performed by the finite element method of multiphysics coupling. Findings - The ion concentration gradient near the cathode and the thickness of the diffusion layer under different rotating velocities are achieved by the finite element method of multiphysics coupling. The calculated concentration and boundary layer thicknesses agree well with those from the theoretical Levich equation. The effect of fluid flow on the current distribution over the electrode surface is also investigated in this model. The results reveal the impact of flow parameters on the current density distribution and thickness of plating layer, which are most concerned in the production of PCBs. Originality/value - By RDE electrochemical model, we build a bridge between the theoretical and experimental study for control of uniformity of plating layer by concentration boundary layer in PCB manufacturing. By means of a multiphysics coupling platform, we can accurately analyze and forecast the characteristic of the entire electrochemical system. These results reveal theoretical connections of current density distribution and plating thickness, with controlled parameters in the plating process to further help us comprehensively understand the mechanism of copper electrodeposition.
机译:目的-本文的目的是优化实验参数,并通过旋转圆盘电极(RDE)模型制造印刷电路板(PCB)的高密度互连中的电镀工艺,从而获得更多见解。通过PCB互连的铜电沉积进行过孔金属化变得越来越重要。在这种金属化技术中,使用特殊的添加剂将铜直接填充到通孔中。为了研究水溶液中电沉积的电化学反应机理,通常在RDE上进行实验。设计/方法/方法-提出了一种电化学模型来描述RDE上铜电沉积的动力学,这为PCB制造中非均匀铜电沉积的理论研究与实验研究之间架起了桥梁。 Comsol Multiphysics是一个多物理场仿真平台,受邀基于二维(2D)轴对称物理建模对流场和电势分布进行建模。电解质中的流动模式由2D Navier-Stokes方程确定。一次,二次和三次电流分布通过多物理场耦合的有限元方法进行。发现-通过多物理场耦合的有限元方法获得了阴极附近的离子浓度梯度和不同旋转速度下扩散层的厚度。计算得出的浓度和边界层厚度与理论Levich方程的结果非常吻合。在此模型中还研究了流体流动对电极表面电流分布的影响。结果揭示了流动参数对电流密度分布和镀层厚度的影响,这是PCB生产中最关注的问题。原创性/价值-通过RDE电化学模型,我们在理论研究与实验研究之间架起了桥梁,以控制PCB制造中浓度边界层对镀层均匀性的控制。通过多物理场耦合平台,我们可以准确地分析和预测整个电化学系统的特性。这些结果揭示了电流密度分布和电镀厚度的理论联系,并在电镀过程中控制了参数,以进一步帮助我们全面了解铜电沉积的机理。

著录项

  • 来源
    《Circuit World》 |2015年第1期|20-28|共9页
  • 作者单位

    State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, PR China and Department of Physics and Electronic Engineering, Yuncheng University, Yuncheng, PR China;

    State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, PR China and Research and Development Department, Guangdong Guanghua Sci-Tech Co., Ltd. Shantou, PR China;

    State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, PR China;

    State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, PR China and Research and Development Department, Guangdong Guanghua Sci-Tech Co., Ltd. Shantou, PR China;

    Research and Development Department, Guangdong Guanghua Sci-Tech Co., Ltd. Shantou, PR China;

    Research and Development Department, Guangdong Guanghua Sci-Tech Co., Ltd. Shantou, PR China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Copper electrodeposition; Multiphysics coupling; Printed circuit boards; Rotating disk electrode;

    机译:铜电沉积;多物理场耦合;印刷电路板;转盘电极;

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