Double loop active vibration control of pneumatic isolator with two separate chambers

摘要

A newly designed pneumatic spring with two separate chambers is promoted and double-loop active control is introduced to overcome the following drawbacks of passive pneumatic isolation: CD The low frequency resonances introduced into the system; (2) Conflict between lower isolation frequency and stiffness high enough to limit quasi-static stroke; (3) Inconsistent isolation level with different force load. The design of two separate chambers is for the purpose of tuning support frequency and force independently and each chamber is controlled by a different valve. The inner one of double-loop structure is pressure control, and in order to obtain good performance, nonlinearities compensation and motion flow rate compensation (MFRC) are added besides the basic cascade compensation, and the influence of tube length is studied. The outer loop has two functions: one is to eliminate the resonance caused by isolation support and to broaden the isolation frequency band by payload velocity feedback and base velocity feed forward, and the other is to tune support force and support stiffness simultaneously and independently, which means the support force will have no effect on support stiffness. Theoretical analysis and experiment results show that the three drawbacks are overcome simultaneously.