Fabrication and characterization of glassy carbon MEMS

摘要

This paper describes the fabrication of free-standing high-carbon microstructures by soft- lithographic techniques; these structures ranged in complexity from simple beams to complex suspended deflectors. Microstructures of polymeric precursors (copolymers of furfuryl alcohol-phenol) to high-carbon solids were fabricated using poly (dimethylsiloxane) (PDMS) molds.