An experimental comparison of the total-electron-yield and conversion-electron-yield models for near-surface characterization using X-ray excitation

摘要

The electron yield technique is a very useful method for studying near-surface information of a thick sample because of the shallowness of the electron escape depth. In the present study, the glancing-angle dependence of the total electron yield (TEY) and the conversion electron yield (CEY) was measured at a 13 keV photon energy. It was found that the signal intensity in the ECY model was larger than that for the TEY mode because air molecules are ionized by high-energy electrons emitted for The sample to form ion-electron pairs in air at atmospheric pressure.