Energy Analysis of Cleanrooms in an Academic Research Building

摘要

The purpose of this study is to perform energy analyses and simulations of a high-technology, academic research building on the University of Maryland (UMD) Campus. The focus of this paper is on facility benchmarking, energy model calibration, and energy efficiency measures (EEMs) proposed and simulated to estimate achievable energy savings for the building's energy-intensive cleanrooms. The high energy intensity of the building, measured as 419 kBtu/ft~2·yr (1322 kWh/m~2·yr), is largely due to the building's cleanrooms, which are responsible for approximately 50% of the total energy consumption in the building. Three EEMs are identified to reduce cleanroom energy consumption by an estimated 21.6% (10.6% of total building energy use). The proposed work contributes significantly to the limited number of cleanroom energy studies published in the academic research community, especially for those cleanrooms embedded in larger buildings.