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Study on subsurface layer of nano-cutting single crystal tungsten in different crystal orientations

机译:不同晶体取向下纳米切割单晶钨的地下层研究

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摘要

The subsurface damage of micro-nano components and high-precision surface affects the reliability and service life of the workpiece. In this study, the nano-cutting molecular dynamics simulation model of single crystal tungsten in different crystal orientations was carried out to investigate the changes of crystal structure and dislocation evolution. The result showed that the dislocation nucleation and movement inside the workpiece lead to the defects such as atomic clusters, stair-rod dislocation and "V-shaped" dislocation. By cutting along 1 1 0 , the best surface quality, the minimum subsurface defect layer depth and the greatest elastic recovery of defect layer can be obtained. During the different cutting process, there are two kinds of dislocation lines in the subsurface layer: 1/2 1 1 1 and 1 0 0 . At the cutting direction of [1 0 0], 1/2 1 1 1 dislocation lines continuously merge into stable 1 0 0 dislocation lines, resulting in a sharp fluctuation of dislocation density. When the cutting directions are [1 1 0] and [1 1 1], 1/2 1 1 1 dislocation lines play an important role in plastic deformation, and the proportion of dislocation merging reaction is very small. This study reveals the formation mechanism of damage layer in ultra-precision cutting of single crystal tungsten from the atomic scale and provides a technical guidance for improving subsurface damage.
机译:微纳米部件和高精度表面的地下损坏影响了工件的可靠性和使用寿命。在该研究中,进行了不同晶体取向单晶钨的纳米切割分子动力学模拟模型,以研究晶体结构和位错进化的变化。结果表明,工件内的位移成核和运动导致原子簇,楼梯脱位和“V形”位错等缺陷。通过沿着<11 0>,可以获得最佳表面质量,最小地下缺陷层深度和缺陷层的最大弹性恢复。在不同的切割过程中,地下层中有两种位错线:1/2 <111 1> <1 0 0>。在[1 0 0]的切割方向,1/2 <11 1>位错线连续地合并成稳定的<1 0 0个位错线,导致位错密度的急剧波动。当切割方向[1 1 0]和[111],1/2 1 1 1>位错线在塑性变形中起重要作用,并且脱位合并反应的比例非常小。本研究揭示了从原子秤上单晶钨的超精密切割中损伤层的形成机制,为改善地下损伤提供了技术指导。

著录项

  • 来源
    《Applied Surface Science》 |2020年第1期|146608.1-146608.10|共10页
  • 作者单位

    Dalian Univ Technol Minist Educ Key Lab Precis & Nontradit Machining Technol Dalian 116024 Peoples R China;

    Dalian Univ Technol Minist Educ Key Lab Precis & Nontradit Machining Technol Dalian 116024 Peoples R China;

    Dalian Univ Technol Minist Educ Key Lab Precis & Nontradit Machining Technol Dalian 116024 Peoples R China;

    Dalian Univ Technol Minist Educ Key Lab Precis & Nontradit Machining Technol Dalian 116024 Peoples R China;

    Dalian Univ Technol Minist Educ Key Lab Precis & Nontradit Machining Technol Dalian 116024 Peoples R China;

    China Acad Engn Phys Inst Machinery Mfg Technol POB 919-601 Mianyang Sichuan Peoples R China;

    Dalian Univ Technol Minist Educ Key Lab Precis & Nontradit Machining Technol Dalian 116024 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Molecular dynamics; Nano-cutting; Crystal orientation; Single crystal tungsten; Subsurface defect; Dislocation evolution;

    机译:分子动力学;纳米切割;晶体取向;单晶钨;地下缺陷;脱位进化;

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