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首页> 外文期刊>Applied Surface Science >Effect of pH on electrical and optical properties of sol-gel derived microcrystalline Ba0.5Sr0.5TiO3 thin films
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Effect of pH on electrical and optical properties of sol-gel derived microcrystalline Ba0.5Sr0.5TiO3 thin films

机译:pH对溶胶-凝胶法制备Ba0.5Sr0.5TiO3微晶薄膜的电学和光学性能的影响

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摘要

Ba0.5Sr0.5TiO3 thin films have been deposited by sol-gel spin coating technique and effect of pH of the precursor sol on the electrical and optical properties has been investigated. Thin films of about 480 nm thickness were deposited on platinised silicon (Pt/TiN/SiO2/Si) and fused quartz substrates using precursor sols of pH 2.8 and 4.8. The pH of the precursor sol is found to have a pronounced effect on the surface morphology, electrical and optical properties of the deposited BST thin films. X-ray diffractograms and atomic force micrographs show increase in the grain size with the increase in pH of the precursor sol. The grain size was found to increase from about 80 nm to about 120 nm. The dielectric constant was also found to increase from 325 to 340 with increase in the pH of the precursor sol. The dielectric loss, however, changes slightly from 0.036 to 0.052. As a consequence the leakage current and interfacial charge densities also increase. The optical studies reveal that the band-gap decreases from 3.75 to 3.66 eV with increase in the pH. (C) 2004 Elsevier B.V. All rights reserved.
机译:通过溶胶-凝胶旋涂技术沉积了Ba0.5Sr0.5TiO3薄膜,并研究了前体溶胶的pH对电学和光学性质的影响。使用pH值2.8和4.8的前体溶胶将约480 nm厚度的薄膜沉积在镀铂硅(Pt / TiN / SiO2 / Si)和熔融石英衬底上。发现前体溶胶的pH对沉积的BST薄膜的表面形态,电学和光学性能有显着影响。 X射线衍射图和原子力显微照片显示,随着前体溶胶的pH值的增加,晶粒尺寸增加。发现晶粒尺寸从约80nm增加到约120nm。还发现,随着前体溶胶的pH增加,介电常数从325增加到340。但是,介电损耗从0.036轻微变化到0.052。结果,泄漏电流和界面电荷密度也增加。光学研究表明,随着pH的增加,带隙从3.75 eV降低到3.66 eV。 (C)2004 Elsevier B.V.保留所有权利。

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