机译:反应溅射Zn-Al合金靶材制备Al掺杂ZnO薄膜的热电性能优化
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China,Shenzhen Key Laboratory of Sensor Technology, Shenzhen, 518060, China;
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China;
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China,Shenzhen Key Laboratory of Sensor Technology, Shenzhen, 518060, China;
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China;
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China,Shenzhen Key Laboratory of Sensor Technology, Shenzhen, 518060, China;
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China,Shenzhen Key Laboratory of Sensor Technology, Shenzhen, 518060, China;
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China;
College of Physics Science and Technology, Institute of Thin Film Physics and Applications, Shenzhen University, 518060, China;
Al-doped ZnO; Thermoelectric thin film; Thermoelectric properties optimization; Zn-Al alloy target;
机译:非对称双极性脉冲直流反应磁控溅射制备Al掺杂ZnO透明导电薄膜的结构与性能
机译:靶分子的入射角对射频磁控溅射制备掺铝ZnO薄膜电性能的影响
机译:衬底温度对直流磁控溅射制备ZnO和Al掺杂ZnO薄膜的结构和光学性能的影响
机译:电极间距和靶角对磁控共溅射制备的掺Al Zno薄膜元素浓度和薄膜性能的影响
机译:通过反应磁控溅射沉积的亚稳态钛(0.5)铝(0.5)铝合金薄膜的物理性能。
机译:NIR退火对RF溅射Al掺杂ZnO薄膜特性的影响
机译:RF磁控溅射制备的非均匀ZnO薄膜晶体结构与电性能的关系