Optimization of pulsed DC PACVD parameters: Toward reducing wear rate of the DLC films

摘要

The effect of pulsed direct current (DC) plasma-assisted chemical vapor deposition (PACVD) parameters such as temperature, duty cycle, hydrogen flow, and argon/CH4 flow ratio on the wear behavior and wear durability of the diamond-like carbon (DLC) films was studied by using response surface methodology (RSM). DLC films were deposited on nitrocarburized AISI 4140 steel. Wear rate and wear durability of the DLC films were examined with the pin-on-disk method. Field emission scanning electron microscopy, Raman spectroscopy, and nanoindentation techniques were used for studying wear mechanisms, chemical structure, and hardness of the DLC films. RSM results show that duty cycle is one of the important parameters that affect the wear rate of the DLC samples. The wear rate of the samples deposited with a duty cycle of >75% decreases with an increase in the argon/CH4 ratio. In contrast, for a duty cycle of <65%, the wear rate increases with an increase in the argon/CH4 ratio. The wear durability of the DLC samples increases with an increase in the duty cycle, hydrogen flow, and argon/CH4 flow ratio at the deposition temperature between 85 degrees C and 110 degrees C. Oxidation, fatigue, abrasive wear, and graphitization are the wear mechanisms observed on the wear scar of the DLC samples deposited with the optimum deposition conditions. (C) 2016 Elsevier B.V. All rights reserved.