Mechanism and control of periodic surface nanostructure formation with femtosecond laser pulses

摘要

Fundamental mechanism of femtosecond-laser-induced periodic surface nanostructure formation has been investigated under the condition using superimposed multiple shots at lower fluence than the single-pulse ablation threshold. With increasing the shot number of low-fluence fs-laser pulses, the periodic nanostructure develops through the bonding structure change of target material, the nano-scale ablation with optical near-fields induced around the high curvatures, and the excitation of surface plasmon polaritons (SPPs) to create the nano-periodicity in the surface structure. It is confirmed that non-thermal interaction at the surface plays the crucial role in the nanostructure formation. Based on the mechanism, we have demonstrated that the periodic nanostructure formation process can be controlled to fabricate a homogeneous nanograting on the target surface, using a two-step ablation process in air. The experimental results obtained represent exactly the nature of a single spatial standing SPP wave mode that generates periodically enhanced near-fields for the nanograting formation. The calculated results for a model target reproduce well the nanograting period and explain the characteristic properties observed in the experiment.