首页> 外文期刊>Applied Physics >Model for roughening and ripple instability due to ion-induced mass redistribution [Addendum to H. Hofsass, Appl. Phys. A 114 (2014) 401, 'Surface instability and pattern formation by ion-induced erosion and mass redistribution']
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Model for roughening and ripple instability due to ion-induced mass redistribution [Addendum to H. Hofsass, Appl. Phys. A 114 (2014) 401, 'Surface instability and pattern formation by ion-induced erosion and mass redistribution']

机译:由于离子引起的质量再分布而引起的粗糙化和波纹不稳定性模型[H. Hofsass,Appl。Chem。S.物理A 114(2014)401,“通过离子诱导的腐蚀和质量再分布形成表面不稳定性和图案”

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摘要

Carter and Vishnyakov introduced a model (CV model) to describe roughening and ripple instability due to ion-induced mass redistribution. This model is based on the assumption that the irradiated surface layer on a static solid substrate is described by a viscous incompressible thin film bound to the substrate by a "no slip" and "no transport" kinematic boundary condition, i.e. similar to a thin film of viscous paint. However, this boundary condition is incomplete for a layer under ion irradiation. The boundary condition must allow exchange of atoms between the substrate and the irradiated film, so that the thickness of the film is always determined by the size of the collision cascade, independent of the evolution of the surface height profile. In addition, the film thickness depends on the local ion incidence angle, which leads to a time dependence of the film thickness at a given position. The equation of motion of the surface and interface profiles for these boundary conditions is introduced, and a new curvature-dependent coefficient is found which is absent in the CV model. This curvature coefficient depends on the angular derivative of the layer thickness and the atomic drift velocity at the film surface induced by recoil events. Such a stabilizing curvature coefficient was introduced in Appl. Phys. A 114 (2014) 401 and is most pronounced at intermediate angles.
机译:Carter和Vishnyakov引入了一个模型(CV模型)来描述由于离子引起的质量重新分布而引起的粗糙化和波纹不稳定性。该模型基于以下假设:静态固体基材上的辐照表面层由通过“不打滑”和“不运输”运动边界条件(即类似于薄膜)与基材粘合的粘性不可压缩薄膜描述。粘性涂料。但是,对于离子照射下的层,该边界条件是不完全的。边界条件必须允许基材和被辐照的薄膜之间发生原子交换,以便薄膜的厚度始终取决于碰撞级联的大小,而与表面高度分布的演变无关。另外,膜厚度取决于局部离子入射角,这导致在给定位置膜厚度的时间依赖性。介绍了这些边界条件下表面和界面轮廓的运动方程,并发现了CV模型中不存在的新的曲率相关系数。该曲率系数取决于由反冲事件引起的层厚度的角导数和膜表面的原子漂移速度。在Appl中引入了这种稳定曲率系数。物理114(2014)401,并且在中间角度时最为明显。

著录项

  • 来源
    《Applied Physics》 |2015年第2期|687-695|共9页
  • 作者

    Hans Hofsaess;

  • 作者单位

    Ⅱ. Physikalisches Institut, Universitaet Goettingen, Friedrich-Hund-Platz 1, 37077 Goettingen, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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