机译:形成高度垂直沟槽,通过电感耦合等离子体反应离子蚀刻用于垂直GaN电力装置
Nagoya University Nagoya 464-8601 Japan ULVAC Inc. Chigasaki 253-8543 Japan;
Nagoya University Nagoya 464-8601 Japan ULVAC Inc. Chigasaki 253-8543 Japan;
ULVAC Inc. Chigasaki 253-8543 Japan;
ULVAC Inc. Chigasaki 253-8543 Japan;
ULVAC Inc. Chigasaki 253-8543 Japan;
ULVAC Inc. Chigasaki 253-8543 Japan;
Toyota Central R&D Labs. Inc. Nagakute 480-1192 Japan;
Nagoya University Nagoya 464-8601 Japan;
Nagoya University Nagoya 464-8601 Japan;