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Ba0.5Sr0.5TiO3-Bi1.5Zn1.0Nb1.5O7 composite thin films with promising microwave dielectric properties for microwave device applications

机译:具有前景的微波介电特性的Ba0.5Sr0.5TiO3-Bi1.5Zn1.0Nb1.5O7复合薄膜在微波器件中的应用

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摘要

Crack-free, dense, and uniform Ba0.5Sr0.5TiO3(BST)-Bi1.5Zn1.0Nb1.5O7(BZN) composite thin films were deposited on (100) LaAlO3, (100) SrTiO3, and (100) MgO substrates via a pulsed laser deposition, using a combined target of BST and BZN ceramics. Phase composition and microstructure of the BST-BZN thin films were characterized by x-ray diffraction and scanning electron microscopy. The films, on LAO, STO, and MgO substrates, showed zero-field microwave (similar to7.7 GHz) dielectric constants of 471, 435, and 401, dielectric loss tangents of 0.0048, 0.0043, and 0.0037, and dielectric tunabilities of 6.2%, 6.0%, and 5.7% at similar to8.1 kV/cm, respectively. The good physical and electrical properties of the BST-BZN composite thin films make them promising candidates for microwave device applications. (C) 2004 American Institute of Physics.
机译:通过(100)LaAlO3,(100)SrTiO3和(100)MgO衬底上沉积无裂纹,致密且均匀的Ba0.5Sr0.5TiO3(BST)-Bi1.5Zn1.0Nb1.5O7(BZN)复合薄膜。使用BST和BZN陶瓷的组合靶进行脉冲激光沉积。用X射线衍射和扫描电子显微镜对BST-BZN薄膜的相组成和显微结构进行了表征。在LAO,STO和MgO基板上的薄膜显示零场微波(类似于7.7 GHz)的介电常数为471、435和401,介电损耗角正切为0.0048、0.0043和0.0037,介电常数为6.2分别为8.1 kV / cm时的%,6.0%和5.7%。 BST-BZN复合薄膜的良好物理和电性能使其成为微波器件应用的有希望的候选者。 (C)2004美国物理研究所。

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