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X-ray wavefront analysis and optics characterization with a grating interferometer

机译:光栅干涉仪的X射线波前分析和光学表征

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We present an interferometric method to measure the shape of a hard-x-ray wavefront. The interferometer consists of a phase grating as a beam splitter and an absorption grating as a transmission mask for the detector. The device can be used to measure wavefront shape gradients corresponding to radii of curvature as large as several dozens of meters, with a lateral resolution of a few microns. This corresponds to detected wavefront distortions of approximately 10~(-12) m or λ/100. The device was used with 12.4 keV x rays to measure the slope error and height profile of an x-ray mirror. Surface slope variations with periods ranging from less than 1 mm to more than 1 m can be detected with an accuracy better than 0.1 μrad.
机译:我们提出了一种干涉测量方法来测量硬X射线波阵面的形状。干涉仪由作为分束器的相位光栅和作为检测器的透射掩模的吸收光栅组成。该设备可用于测量与几十米大的曲率半径相对应的波前形状梯度,其横向分辨率为几微米。这对应于检测到的约10〜(-12)m或λ/ 100的波前畸变。该设备与12.4 keV x射线一起使用,以测量x射线反射镜的斜率误差和高度轮廓。可以检测到范围从小于1 mm到大于1 m的表面坡度变化,精度优于0.1μrad。

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