Electrostatically coupled vibration modes in unimorph complementary microcantilevers

摘要

To extend the tuning capabilities of radio frequency devices, coupled microelectromechanical systems are often employed. In this letter, we demonstrate piezoelectrically actuated, electrically tuneable resonator systems based on coupled micromechanical oscillators operating in a flexural vibration mode. The substantial enhancement in electrostatic coupling was achieved due to the implementation of lateral nanogaps of 100-200 nm between single resonator bars. This allows for resonator synchronization and precise system frequency tuning by over a factor of two, relative to its initial value. Additionally, a simple electro-mechanical model has been developed to describe the dynamic behavior of the electrostatically coupled oscillators.