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Ultra-low voltage, organic thin film transistors fabricated on plastic substrates by a highly reproducible process

机译:通过高度可复制的工艺在塑料基板上制造的超低压有机薄膜晶体管

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摘要

Organic thin film transistors have been fabricated on plastic substrates using a combination of two ultrathin insulating films, namely a 6nm Al_2O_3 film (grown by UV-Ozone treatment of a pre-deposited aluminium film) and a 25 nm parylene C film deposited by vapour phase, as gate dielectric. They show a very low leakage current density, around 2×10~(-9) A/cm~2, and, most importantly, can be operated at voltages below 1 V. We demonstrate that this low-cost technique is highly reproducible and represents a step forward for the routine fabrication of ultra-low voltage plastic electronics.
机译:已经使用两种超薄绝缘膜的组合在塑料基板上制造了有机薄膜晶体管,即6nm Al_2O_3膜(通过预沉积铝膜的UV-臭氧处理生长)和通过气相沉积的25nm聚对二甲苯C膜,作为栅极电介质。它们显示出非常低的泄漏电流密度,大约为2×10〜(-9)A / cm〜2,并且最重要的是可以在低于1 V的电压下工作。我们证明了这种低成本技术具有很高的重现性,代表了超低压塑料电子产品常规制造的进步。

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  • 来源
    《Applied Physics Letters》 |2012年第9期|p.093305.1-093305.5|共5页
  • 作者单位

    Department of Electrical and Electronic Engineering, University ofCagliari Piazza d'Armi,09123 Cagliari, Italy,CNR - Institute of Nanoscience, Centre S3, Via G. Campi, 2131A - 41100 Modena, Italy;

    Department of Electrical and Electronic Engineering, University ofCagliari Piazza d'Armi,09123 Cagliari, Italy;

    Department of Electrical and Electronic Engineering, University ofCagliari Piazza d'Armi,09123 Cagliari, Italy;

    Department of Electrical and Electronic Engineering, University ofCagliari Piazza d'Armi,09123 Cagliari, Italy,CNR - Institute of Nanoscience, Centre S3, Via G. Campi, 2131A - 41100 Modena, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
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  • 入库时间 2022-08-18 03:17:08

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