Ultra-thin Co/Pd multilayers with enhanced high-temperature annealing stability

摘要

Understanding the thermal budget of perpendicular materials is crucial for the potential application perpendicular magnetic tunnel junctions. In this paper, we study the effects of high-temperature rapid thermal annealing on the structural and magnetic properties of ultra-thin Co/Pd multilayers deposited at room temperature. It is shown that perpendicular magnetic anisotropy of ultra-thin Co/Pd multilayers improves with increasing annealing temperature up to 425 ℃. This property of ultra-thin Co/Pd multilayers provides increased thermal budgets for CMOS-integrated magnetic devices.