Cavity piezooptomechanics: Piezoelectrically excited, optically transduced optomechanical resonators

摘要

We present a monolithic integrated aluminum nitride (AlN) optomechanical resonator in which the mechanical motion is actuated by piezoelectric force and the displacement is transduced by a high-Q optical cavity. The AlN optomechanical resonator is excited from a radio-frequency electrode via a small air gap to eliminate resonator-to-electrode loss. We observe the electrically excited mechanical motion at 47.3MHz, 1.04GHz, and 3.12GHz, corresponding to the 1st, 2nd, and 4th radial-contour mode of the wheel resonator, respectively. An equivalent circuit model is developed to describe the observed Fano-like resonance spectrum.