Pyroelectric aluminum nitride micro electromechanical systems infrared sensor with wavelength-selective infrared absorber

摘要

This paper describes a micro electromechanical systems type wavelength-selective pyroelectric sensor, with highly c-axis oriented Aluminum nitride film as the pyroelectric material. Wavelength-selective infrared absorption is realized via periodic structures of holes patterned into the top metal electrode that also collects pyroelectric charge signal. The periodic hole array results in optical absorption resonances whose wavelength is determined by the hole pitch, demonstrated experimentally using a Fourier transform infrared spectrometer and numerically calculated using the finite difference time domain method. A significant difference in infrared absorption between patterned and unpatterned detectors is demonstrated through optical experiments comparing the pyroelectric responses.