Vibrational modes of ultrathin carbon nanomembrane mechanical resonators

摘要

We report measurements of vibrational mode shapes of mechanical resonators made from ultrathin carbon nanomembranes (CNMs) with a thickness of approximately 1 nm. CNMs are prepared from electron irradiation induced cross-linking of aromatic self-assembled monolayers and the variation of membrane thickness and/or density can be achieved by varying the precursor molecule. Single-and triple-layer freestanding CNMs were made by transferring them onto Si substrates with square/ rectangular orifices. The vibration of the membrane was actuated by applying a sinusoidal voltage to a piezoelectric disk on which the sample was glued. The vibrational mode shapes were visualized with an imaging Mirau interferometer using a stroboscopic light source. Several mode shapes of a square membrane can be readily identified and their dynamic behavior can be well described by linear response theory of a membrane with negligible bending rigidity. By applying Fourier transformations to the time-dependent surface profiles, the dispersion relation of the transverse membrane waves can be obtained and its linear behavior verifies the membrane model. By comparing the dispersion relation to an analytical model, the static stress of the membranes was determined and found to be caused by the fabrication process.