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机译:演示三层镜物镜在超紫外线显微镜下的30 nm空间分辨率:通过观察光刻掩模进行成像测试
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan;
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan;
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan;
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan;
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan;
EUVL Infrastructure Development Center, Inc., Tsukuba, Ibaraki 305-8569, Japan;
EUVL Infrastructure Development Center, Inc., Tsukuba, Ibaraki 305-8569, Japan;
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan;
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan;
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan;
机译:光电发射显微技术检测极紫外光刻多层掩模板的高分辨率光化缺陷
机译:带有遮光边框的薄吸收剂极紫外光刻掩模,适用于全视场扫描仪:掩模工艺会改变平整度和图像放置
机译:带有遮光边框的薄吸收剂极紫外光刻掩模,适用于全视场扫描仪:掩模工艺会改变平整度和图像放置
机译:极紫外光刻掩模中图像放置错误的调查
机译:强烈的毛细管放电等离子体极紫外光源,用于极紫外光刻和其他极紫外成像应用。
机译:全场光学相干断层扫描显微镜证明了对深度分辨角膜图像的客观分析得出的角膜透明度的定量测量
机译:高数字光圈光刻中的极端紫外线掩模粗糙度效应
机译:光化掩模成像:sHaRp EUV显微镜的最新结果和未来方向。会议:极紫外(EUV)光刻V,加利福尼亚州圣何塞,2014年2月23日;相关信息:期刊出版日期:2014年4月17日。