首页> 外文期刊>Applied physics express >Reply to 'Comment on 'Current perpendicular to film plane type giant magnetoresistance effect using a Ag-Mg spacer and Co_2Fe_(0.4)Mn_(0.6)Si Heusler alloy electrodes'' [Appl. Phys. Express 8, 063008 (2015)]
【24h】

Reply to 'Comment on 'Current perpendicular to film plane type giant magnetoresistance effect using a Ag-Mg spacer and Co_2Fe_(0.4)Mn_(0.6)Si Heusler alloy electrodes'' [Appl. Phys. Express 8, 063008 (2015)]

机译:答复“关于'使用Ag-Mg隔离层和Co_2Fe_(0.4)Mn_(0.6)Si Heusler合金电极的电流垂直于薄膜平面型巨磁电阻效应的评论” [Appl。物理Express 8,063008(2015年)]

获取原文
获取原文并翻译 | 示例
           

摘要

To begin with, we would like to appreciate the comments by Furubayashi et al. The following are our answers to their questions. Answer to question 1): The device sizes, A, were measured using scanning electron microscope (SEM) images of a reference sample, which were patterned by electron-beam lithography and ion milled by Ar plasma, similar to that of current perpendicular to film plane type giant magneto-resistance (CPP-GMR) devices. The SEM observation was performed after removing the electron beam resist. Considering the distributions among the batches of the patterning, reproducibility was very good, and we achieved reasonable results as observed in our reference Ag spacer devices in the presented paper.
机译:首先,我们要感谢Furubayashi等人的评论。以下是我们对他们的问题的答案。问题1的答案:器件尺寸A是使用参考样品的扫描电子显微镜(SEM)图像测量的,该图像通过电子束光刻形成图案并通过Ar等离子体进行离子铣削,类似于垂直于薄膜的电流平面型巨磁阻(CPP-GMR)装置。在去除电子束抗蚀剂之后进行SEM观察。考虑到图案化的批次之间的分布,可重复性非常好,并且我们在本文的参考银间隔装置中获得了合理的结果。

著录项

  • 来源
    《Applied physics express》 |2015年第11期|119102.1-119102.1|共1页
  • 作者单位

    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan;

    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan;

    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号