Microsolidics: Fabrication of Three-Dimensional Metallic Microstructures in Poly(dimethylsiloxane)

摘要

This Communication describes a method of fabricating complex metallic microstructures in 3D by injecting liquid solder into microfluidic channels, and allowing the solder to cool and solidify; after fabrication, the metallic structures can be flexed, bent, or twisted. This method of fabrication—which we call microsolidics—takes advantage of the techniques that were developed for fabricating microfluidic channels in poly(dimethylsiloxane) (PDMS) in 2D and 3D, uses surface chemistry to control the interfacial free energy of the metal-PDMS interface, and uses techniques based on microfluidics, but ultimately generates solid metal structures. This approach makes it possible to build flexible electronic circuits or connections between circuits, complex embedded or freestanding 3D metal microstructures, 3D electronic components, and hybrid electronic-microfluidic devices.