Formation of large area closely packed carbon onions film by plasma-based ion implantation

摘要

(Color online) Carbon nanoparticle formation in Ag films. ( ) Cross-sectional TEM image of the Ag film after methane plasma implantation of carbon ions accelerated at 20 kV. The ions were implanted from the surface (left) to the interface (right). ( ) Magnified TEM micrograph of ( ). Bright spots indicated by arrows denote the carbon nanoparticle formation. ( ) The size distribution of the nanoparticles of ( ).