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Design and fabrication of a 40-MHz annular array transducer

机译:40 MHz环形阵列换能器的设计与制造

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摘要

This paper investigates the feasibility of fabricating a 5-ring, focused annular array transducer operating at 40 MHz. The active piezoelectric material of the transducer was a 9-μm thick polyvinylidene fluoride (PVDF) film. One side of the PVDF was metallized with gold and forms the ground plane of the transducer. The array pattern of the transducer and electrical traces to each annulus were formed on a copper-clad polyimide film. The PVDF and polyimide were bonded with a thin layer of epoxy, pressed into a spherically curved shape, and then back filled with epoxy. A 5-ring transducer with equal area elements and 100 μm kerfs between annuli was fabricated and tested. The transducer had a total aperture of 6 mm and a geometric focus of 12 mm. The pulse/echo response from a quartz plate located at the geometric focus, two-way insertion loss (IL), complex impedance, electrical cross-talk, and lateral beamwidth were all measured for each annulus. The complex impedance data from each element were used to perform electrical matching and the measurements were repeated. After impedance matching, fc ≈ 36 MHz and BWs ranged from 31 to 39%. The ILs for the matched annuli ranged from −28 to −38 dB.
机译:本文研究了制造工作在40 MHz的5环聚焦环形阵列换能器的可行性。换能器的活性压电材料是9微米厚的聚偏二氟乙烯(PVDF)膜。 PVDF的一侧用金金属化并形成换能器的接地平面。换能器的阵列图案和到每个环的电迹线形成在覆铜的聚酰亚胺膜上。 PVDF和聚酰亚胺用环氧树脂薄层粘合,压制成球形弯曲的形状,然后回填环氧树脂。制造并测试了具有相等面积的元件和环之间100μm切口的5环换能器。换能器的总孔径为6 mm,几何焦点为12 mm。对于每个环,都测量了位于几何焦点处的石英板的脉冲/回波响应,双向插入损耗(IL),复阻抗,电串扰和横向波束宽度。来自每个元件的复数阻抗数据用于执行电匹配,并重复测量。阻抗匹配后,fc≈36 MHz,带宽在31%至39%之间。匹配瓣环的IL范围为-28至-38 dB。

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