Polymer microring resonators fabricated by nanoimprinting are presented as a means of ultrasound detection. Acoustic waves impinging on a ring-shaped optical resonator cause strain in the ring dimensions, modulating optical output. Basic acoustic and optical characteristics of the microring sensor are presented. Measurements at several frequencies show a high sensitivity and low noise-equivalent pressure. The angular response is determined by sensing the optoacoustic excitation of a 49 μm polyester microsphere and shows wide-angle sensitivity. A 1-D array consisting of 4 microrings is demonstrated using wavelength multiplexing for addressing each element. The high sensitivity, bandwidth, and angular response make it a potentially useful sensor platform for many applications including high-frequency ultrasonic and photoacoustic imaging.
展开▼
