Superconducting nanowire single-photon detectors are an ideal match for integrated quantum photonic circuits due to their high detection efficiency for telecom wavelength photons. Quantum optical technology also requires single-photon detection with low dark count rate and high timing accuracy. Here we present very low noise superconducting nanowire single-photon detectors based on NbTiN thin films patterned directly on top of Si3N4 waveguides. We systematically investigate a large variety of detector designs and characterize their detection noise performance. Milli-Hz dark count rates are demonstrated over the entire operating range of the nanowire detectors which also feature low timing jitter. The ultra-low dark count rate, in combination with the high detection efficiency inherent to our travelling wave detector geometry, gives rise to a measured noise equivalent power at the 10−20 W/Hz1/2 level.
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机译：超导纳米线单光子探测器因其对电信波长光子的高检测效率而成为集成量子光子电路的理想选择。量子光学技术还需要具有低暗计数率和高定时精度的单光子检测。在这里，我们介绍了基于NbTiN薄膜的非常低噪声的超导纳米线单光子探测器，该探测器直接在Si3N4波导的顶部构图。我们系统地研究了多种检测器设计，并表征了它们的检测噪声性能。在纳米线检测器的整个工作范围内都证明了毫赫兹暗计数率，该检测器还具有低时序抖动。极低的暗计数率，再加上行波检测器固有的高检测效率，可在10 −20 W / Hz 1时产生测得的噪声等效功率/ 2 级。
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