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All Dielectric Transmissive Structural Multicolor Pixel Incorporating a Resonant Grating in Hydrogenated Amorphous Silicon

机译:在氢化非晶硅中结合谐振光栅的所有介电透射结构多色像素。

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摘要

All dielectric transmissive type polarization-tuned structural multicolor pixels (MCPs) are proposed and demonstrated based on a one-dimensional hydrogenated amorphous silicon (a-Si:H) grating integrated with a silicon nitride waveguide. Both bandpass and bandstop transmission filtering characteristics in the visible regime, centered at the same wavelength, have been achieved by tailoring the structural parameters including the duty ratio of the grating and the thickness of the dielectric waveguide. For the three manufactured MCPs, the transmission peak exceeds 70% for the transverse electric (TE) polarization and 90% for the transverse magnetic (TM) polarization as observed at the resonance and off-resonance wavelength, respectively. The polarization-switched transmissions are attributed to the guided mode resonance initiated by the interaction of the a-Si:H grating and the dielectric waveguide. A broad color palette covering the entire visible band was successfully realized from a suite of MCPs with varying grating pitches. The proposed structural color pixels are expected to facilitate the construction of dynamic displays, image sensors, optical data storage, security tags, and so forth.
机译:基于集成有氮化硅波导的一维氢化非晶硅(a-Si:H)光栅,提出并演示了所有介电透射型偏振调谐结构多色像素(MCP)。通过调整结构参数(包括光栅的占空比和介电波导的厚度),可以实现以可见光为中心,以相同波长为中心的带通和带阻传输滤波特性。对于三个制造的MCP,分别在共振和非共振波长处观察到,透射电(TE)极化的透射峰超过70%,横向磁(TM)极化的透射峰分别超过90%。偏振转换的传输归因于由a-Si:H光栅和介电波导的相互作用引发的引导模式共振。一套可变光栅间距的MCP成功地实现了覆盖整个可见波段的宽调色板。预期所提出的结构彩色像素将有助于动态显示器,图像传感器,光学数据存储,安全标签等的构造。

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