The effects of gas-rarefaction on dynamic characteristics of micro spiral-grooved-thrust-bearing are studied. The Reynolds equation is modified by the first order slip model, and the corresponding perturbation equations are then obtained on the basis of the linear small perturbation method. In the converted spiral-curve-coordinates system, the finite-volume-method (FVM) is employed to discrete the surface domain of micro bearing. The results show, compared with the continuum-flow model, that under the slip-flow regime, the decrease in the pressure and stiffness become obvious with the increasing of the compressibility number. Moreover, with the decrease of the relative gas-film-thickness, the deviations of dynamic coefficients between slip-flow-model and continuum-flow-model are increasing.
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