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A Novel Tactile Sensor with Electromagnetic Induction and Its Application on Stick-Slip Interaction Detection

机译:新型电磁感应触觉传感器及其在粘滑相互作用检测中的应用

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摘要

Real-time detection of contact states, such as stick-slip interaction between a robot and an object on its end effector, is crucial for the robot to grasp and manipulate the object steadily. This paper presents a novel tactile sensor based on electromagnetic induction and its application on stick-slip interaction. An equivalent cantilever-beam model of the tactile sensor was built and capable of constructing the relationship between the sensor output and the friction applied on the sensor. With the tactile sensor, a new method to detect stick-slip interaction on the contact surface between the object and the sensor is proposed based on the characteristics of friction change. Furthermore, a prototype was developed for a typical application, stable wafer transferring on a wafer transfer robot, by considering the spatial magnetic field distribution and the sensor size according to the requirements of wafer transfer. The experimental results validate the sensing mechanism of the tactile sensor and verify its feasibility of detecting stick-slip on the contact surface between the wafer and the sensor. The sensing mechanism also provides a new approach to detect the contact state on the soft-rigid surface in other robot-environment interaction systems.
机译:实时检测接触状态,例如机器人与末端执行器上的物体之间的粘滑相互作用,对于机器人稳定地抓握和操纵物体至关重要。本文提出了一种基于电磁感应的新型触觉传感器及其在粘滑相互作用中的应用。建立了触觉传感器的等效悬臂梁模型,该模型能够构造传感器输出与施加在传感器上的摩擦力之间的关系。利用触觉传感器,根据摩擦力变化的特点,提出了一种检测物体与传感器接触表面粘滑相互作用的新方法。此外,针对典型应用开发了原型,通过根据晶圆传输的要求考虑空间磁场分布和传感器尺寸,在晶圆传输机器人上稳定地传输晶圆。实验结果验证了触觉传感器的传感机制,并验证了其在晶片与传感器之间的接触表面上检测粘滑的可行性。传感机制还提供了一种新的方法来检测其他机器人与环境交互系统中的软硬表面上的接触状态。

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