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Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure

机译:激光加工的微腔可同时测量高温和高压

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摘要

Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ∼0.0779 nm/°C and ∼1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ∼32.3 nm/°C and ∼24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions.
机译:演示了用于同时测量高温和高压的激光加工微腔。这两个级联的微腔是空气腔和包括一部分纤维和空气腔的复合腔。它们都被放置在炉子内的压力室中,以同时进行压力和高温测试。短气腔的热系数和压力系数分别为〜0.0779 nm /°C和〜1.14 nm / MPa。复合腔的热系数和压力系数分别约为32.3 nm /°C和24.4 nm / MPa。由于热系数和压力系数不同,该传感器可用于分离温度和压力。这种传感器头的卓越特性是它可以承受高达400°C的高温,并在高温条件下实现高压的精确测量。

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