商用电容薄膜真空规存在体积大、重量重等问题,无法满足深空探测中真空测量需求,因此设计了一种小型电容薄膜真空规.设计中采用倒T型结构固定极板和防热变形结构,防止测量过程中温度变化导致的规管部件热变形；采用面积相同的双电极结构,消除测量过程中外界杂散电容和温度变化引起的测量信号偏差.小型电容薄膜真空规整体尺寸为φ42×24 mm,重量小于200 g,测量下限为10-2 Pa,测量不确定度预计小于5％,能适应较宽的工作温度范围,可以满足深空探测需求.%Commercial capacitance diaphragm vacuum gauge cannot be satisfied of the requirement for vacuum measurement in deep space exploration; the miniature capacitance diaphragm gauge has been designed. To prevent the heat deflection of the gauge brought by the temperature variation in measurement process, the inverted T-shaped electrode plate and the construction for preventing the heat deflection have been used. To eliminate the stray capacitance and the deflection of measurement signal brought by temperature variation in the measurement process, the dual electrode construction has been used. The size of miniature capacitance diaphragm vacuum gauge is Φ42 mm×24 mm. Its weight is less than 200 g. The measurement of the minimum is 10-2 Pa. The combined standard uncertainty is less than 5% . The miniature capacitance diaphragm gauge has the wide operating temperature range and can satisfy of the requirement of deep space exploration.
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