机译:残余压应力下微膜力学性能的确定
Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China;
Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China;
Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China;
Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China;
micromachining; mechanical properties; Young's modulus; residual stress; compressive stress;