机译:基于微型MEMS的压力传感器在颅内压测量中的应用
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 100083,China;
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;
Institute of Microelectronics, Tsinghua University, Beijing 100084, China;