基于LiCl湿敏涂层的QCM湿度传感特性的研究

摘要

Humidity sensing characteristics of quartz crystal microbalance (QCM) humidity sensor coated with LiCl, whose mass ratio is 0.2 % ,is studied. The experimental results show that the QCM humidity sensing unit with mass ratio 0. 2 % Lid humidity sensitive coating exhibits broad linear range of 13 % - 94 % RH, high sensitivity,good repeatability,small hysteresis,digital output and nanogram-level measurement precision,and has very attractive prospect of application.%对0.2％质量比LiCl薄膜涂层的QCM湿度传感单元湿敏特性进行了系统性的研究.研究结果表明:0.2％质量比LiCl-QCM的湿度传感单元的线性测量范围为13％～94％ RH,克服了常规LiCl湿敏材料传感单元量程窄的缺点.另外,此湿度传感单元还具有重复性好、灵敏度高、湿滞小(小于10 Hz)、数字频率化输出等优点,因而,具有较好的潜在应用前景.