A novel precision vibration-assisted micro-engraving system was developed by the integration of fast tool servo and ultrasonic elliptical vibration system, in which the flexure hinge was designed to avoid backlash and PID control algorithm was established to guarantee specific precision. Apart from experimental validation of the performance of the system, various micro-V-grooves cutting experiments on aluminum alloy, ferrous material and hard cutting material were performed, in which Kistler force sensor was used to measure cutting force. Through experiments, it was clear that the vibration-assisted micro-engraving system can ensure good quality of micro-V-grooves and reduce cutting force by about 60% compared with traditional removal process without ultrasonic vibration.
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