Temperature measurement based on radialization power for micro-hotplate

摘要

A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis (FEA) software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable.