State Key Laboratory for Mesoscopic Physics;
School of Physics;
Beijing 100871;
China;
The Institution of Microelectronics;
Chinese Academy of Sciences;
Beijing 100010;
China The Institution of Microelectronics;
Chinese Academy of Sciences;
Beijing 100010;
China The Institution of Microelectronics;
Chinese Academy of Sciences;
Beijing 100010;
China State Key Laboratory for Mesoscopic Physics;
School of Physics;
Beijing 100871;
China State Key Laboratory for Mesoscopic Physics;
School of Physics;
Beijing 100871;
China;
glow; discharge; tunnel; electrical; characteristics; surface; modification; polyester; film;