AISI M2钢上磁控溅射TiN、TiAlN和TiAlVN薄膜的显微结构

摘要

In order to study the effect of the microstructure with Al and V added TiN coatings, TiN, TiAlN and TiAlVN coatings were deposited on AISI M2 high-speed steels by magnetron reactive sputtering. The microstructures of all the coatings were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The results indicate that the addition of Al into TiN coatings reduces their lattice constant, but a further addition of V into TiAlN coatings increases their lattice constant. Moreover, the growth morphologies for TiN, TiAlN, and TiAlVN indicate that adding Al and V has a tendency to improve the columnar structure. The (111) and (200) orientations of TiN, TiAlN, and TiAlVN are identified. Theε(Fe3N-Fe2N) phase occurs because a small amount of Fe is present in the coatings. The interlayers of TiAlN and TiAlVN have the preferred (01 1 0) orientation. The texture (columnar) structure of the (111) and (200) orientations is observed in the TiAlN and TiAlVN coatings. An orientation relationship of (01 1 0)α-Ti//(110)T.M occurs between the interlayer and tempered martensite (T.M) in TiAlVN.%为了研究Al和V掺杂对TiN薄膜微结构的影响，用磁控溅射法在AISI M2高速钢上沉积TiN、TiAlN和TiAlVN薄膜。采用XRD、SEM和TEM对薄膜的显微结构进行表征。结果表明，TiN薄膜中掺杂Al引起了晶格常数的降低，TiAlN中掺杂V则导致晶格常数的增加。另外，TiN、TiAlN和TiAlVN薄膜的生长形态显示，添加Al和V有改善柱状结构的倾向。在TiN、TiAlN和TiAlVN薄膜中鉴定出(111)和(200)晶向，ε(Fe3N-Fe2N)相的存在是因为薄膜中存在少量的Fe。TiAlN和TiAlVN薄膜夹层具有(0110)择优取向。在TiAlN和TiAlVN薄膜中观察到(111)和(200)晶向的织构(柱状)结构，在TiAlVN/M2夹层和回火马氏体之间存在(0110)α-Ti//(110)T.M的位向关系。