A 3-DOF ultrasonic motor with a cylindershaped stator and a spherical rotor is developed. The motor provides 3-DOF rotation around x, y. and z-axes implemented by two second order bending modes with orthogonality and one first order longitudinal mode of the stator, The three modes must satisfy some conditions. In our previous research, in order to satisfy these conditions, a parameter fitting design method is used. However, it is an experiential design method with low efficiency and costs much time, sometimes it even cannot find a desired solution, This paper puts forward an optimal design method for the stator. Based on the method, an optimization program is developed in MATLAB environment. Using the program, a new prototype of 3-DOF ultrasonic motor is designed. Its stator has diameter of 20 ram. height of 67 mm, and mass of 157 g. Experimental results show that the measured stators' modal frequencies and modal shapes are in good consistent agreement with the results obtained by the optimal design program.
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