超声流量计中基于MCP42100的程控增益系统

摘要

在半导体制造过程中存在着对小管径流体的流量监测问题,对同一种流量传感器,其监测的流体对象可能是不同的介质,超声信号在这种情况下其幅值会有一定的不同,因而会影响测量精度.本文针对这种情况给出了一种使用数字电位器MCP42100的增益补偿方法以解决上述问题.%There has the problem of small diameter fluid monitoring in semiconductor manufacturing process. The same sensor may be used for different medium, so the amplitude of ultrasonic signal may has some different in such case and affects measuring accuracy. This paper put forward a gain compensation method by using digital potentiometer MCP42100 to solve this problem.