机译:外延层转移制备的绝缘体上硅结构
State Key Lab. of Functional Material and Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, CHN;
State Key Lab. of Functional Material and Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, CHN;
State Key Lab. of Functional Material and Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, CHN;
State Key Lab. of Functional Material and Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, CHN;
State Key Lab. of Functional Material and Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, CHN;
State Key Lab. of Functional Material and Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, CHN;
State Key Lab. of Functional Material and Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, CHN;
SOI; Porous silicon; Silicon epitaxy; Wafer bonding;