机译:射频反应溅射沉积在玻璃上的多晶ZnO薄膜
Dept.of Phys.,Shaoxing College of Arts and Sciences,Shaoxing 312000,CHN;
Dept.of Phys.,Shaoxing College of Arts and Sciences,Shaoxing 312000,CHN;
Dept.of Phys.,Shaoxing College of Arts and Sciences,Shaoxing 312000,CHN;
Dept.of Phys.,Shaoxing College of Arts and Sciences,Shaoxing 312000,CHN;
Dept.of Phys.,Lanzhou University,Lanzhou 730000,CHN;
Dept.of Phys.,Lanzhou University,Lanzhou 730000,CHN;
ZnO films; RF reactive sputtering; Preferred orientation; Optical transmittance;