Lamb wave sensors array for nonviscous liquid sensing

摘要

The interdigital transducer (IDT) can excite Lamb wave in a piezoelectric plate loading with a liquid layer, and the phase velocity of Lamb wave is associated with the properties of the liquid layer. In this paper, the concept of effective permittivity is introduced to study the Lamb wave's potential application in liquid sensing. Considering the measuring of ideal nonviscous liquid, the sensors array is designed to sense the density and the dielectric constant of the liquid layer simultaneously. Using LiNbO3 as piezoelectric material, in order to improve the sensors array sensitivity and the electro-mechanical coupling coefficient, the optimized results including plate thicknesses and cut orientations are presented by numerical simulation. These studies show that the Lamb wave sensors array can be potential in liquid sensing.