High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization(SILEC)

摘要

Dear editor,Three-dimensional monolithic integration(3D-MI)has recently emerged for both"more Moore"and"more than Moore"applications,because of its high integration density,high bandwidth and multi-functions[1].With 3D-MI,different types of devices can be stacked on the same platform and in a single process flow.