School of Materials Science and Engineering;
Dalian University of Technology;
Dalian 116024;
China School of Materials Science and Engineering;
Dalian University of Technology;
Dalian 116024;
China;
Key Laboratory of Materials Modification by Laser;
Ion and Electron Beams;
Ministry of Education;
Dalian University of Technology;
Dalian 116024;
China Institute of Materials Engineering;
University of Siegen;
Paul-Bonatz-Straβe 9-11. D-57076 Siegen;
Germany;
Ti-Al-N; DC magnetron sputtering; phase transition; hardness;