Computation speedup in the dynamic simulation of MEMS by macromodels

摘要

A doubly clamped microbeam actuated by electrostatic force with squeezed gas film damping is a well-known and standard micro-device in microelectromechanical system (MEMS) for many researchers to demonstrate how reduced-order dynamic macromodel is an effective way to faithfully capture the device behaviors. However it still takes time to directly recompute the time-dependant nonlinear terms in macromodels which are generated by a proper orthogonal decomposition (POD) method with Galerkin procedure at every time step during the macromodel simulation. This paper proposes two methods for speeding up the computation of macromodel simulations. In the first method, the computation speedup is achieved based on the concept of precomputation upon the basis functions are available. In the second method, cubic splines approximation is used to interpolate the basis functions and their first and second derivatives, and spatial integration is performed by application of the Gaussian quadrature. Numerical results show both methods could enhance the efficiency of the macromodel simulation compared with our previous computation results.