Effect of chlorine doping on the structural, morphological, optical and electrical properties of spray deposited CdS thin films

摘要

CdS and chlorine doped CdS（CdS:Cl） thin films with different Cl-doping levels（0,2,4,6 and 8 at%） have been deposited on glass substrates by a spray pyrolysis technique using a perfume atomizer.The effect of Cl doping on the structural,morphological,optical and electrical properties of the films was investigated.XRD patterns revealed that all the films exhibit hexagonal crystal structure with a preferential orientation along the（0 0 2） plane irrespective of the Cl doping level.The particle size value decreases from 22.03 nm to 18.12 nm with increase in Cl concentration.Optical band gap is blue-shifted from 2.48 eV to 2.73 eV with increase in Cl doping concentration.All the films have resistivity in the order of 10~4 Ω cm.The obtained results confirm that chlorine as an anionic dopant material can enhance the physical properties of CdS thin films to a large extent.